Sweeping the lean angle can enhance movie thickness uniformity and sidewall coverage whilst also averting large Electricity-mirrored neutral species for important processes.

IBSD usually takes spot inside of a superior vacuum ecosystem, minimizing noble gasoline inclusion within the deposited movie and strengthening the environmental security of your coating.

Focus on rotation and carousel indexing Every have torque feeling, preventing any course of action challenges due to slips or jams in rotation.

The dimensions, situation, and equipment ratio of each and every World are optimized to supply the absolute best attainable movie thickness uniformity.

Our Reticle® ion beam sputter deposition methods are built and engineered to build exact optical movies of the highest purity, density, and stability.

Variable angle phases allow for for quite impressive skinny film approaches. Nevertheless, certainly one of its most significant challenges is reproducibility. The substrate is usually set at a really oblique angle in relation to the resource, as well as movies are quite sensitive for the precision of the angle.

Angstrom went to good lengths to refine the tolerances of the lean angle, improving it from the variation of nearly a full degree on non-Angstrom systems I’ve utilized to under 0.

Our exclusive layout allows for direct or indirect checking of the variable angle phase, reducing the need for tooling components or perhaps a witness glass changer. Find out more regarding the Optical Checking & Control package below.

As well as sample rotation, the variable angle stage that may be used for Reticle® delivers for in-built angular movement with the deposition flux.

All conventional Reticle® platforms involve an additional gridless stop-Corridor ion source with hollow cathode neutralizer.

The deposition ion resource is directed towards a fabric goal which has been optimized in both of those High-temperature metal components dimension and placement to the essential deposition geometry.

Self-aligned ion optics are configured especially for the desired deposition requirements and geometry of your respective procedure.

A minimal-frequency neutralizer guarantees steady beam operation with no contamination from a traditional filament.

Dynamic uniformity shaping is accomplished utilizing a flux correction defend amongst the deposition source as well as substrate.

Each individual axis of movement is controlled through Aeres® working with precision servo motors, offering a lot better than 0.1 levels of positional precision. Entrance side infrared heating bulbs tilt While using the phase to provide a constant temperature profile for reactive processes.